Ultra Pure Water Management in Semiconductor Manufacturing: Insights on Reuse and Quality Control

Ultra Pure Water Management in Semiconductor Manufacturing

Discover expert insights on ultra pure water reuse and quality control in semiconductor fabs. In this interview, AZoMaterials speaks with METTLER TOLEDO about the critical role of ultra-pure water management in semiconductor fabs.

Ultra-pure water (UPW), also known as deionized (DI) water, is essential to nearly every process in a semiconductor fab, from etching and cleaning to chemical mechanical planarization (CMP). The semiconductor industry is the world’s largest consumer of UPW.

Fabs typically start by bringing in raw water, which goes through pretreatment, polishing to UPW-grade quality, distribution to the process tools, and finally, assessment for either reuse or discharge. Reducing water consumption is a major environmental focus, guided by industry efforts like the FO-98 committee.

Author summary: Experts discuss ultra pure water management in semiconductor manufacturing.

more

AZoM AZoM — 2025-10-28

More News